Technical Data:
Product type: Piezo-electric lifting table / vertical axis
L x W x H: 100 x 100 x approx.61.6mm
Adjustable rise: 200um
Operating voltage: -50 to 200V
Stiffness: 0.1N/m
Maximum centered load: 20N
Resonant frequency without load: approx.100Hz
Maximum travelling speed: 1000um/s
Maximum angle deviation beta-x: 0.2mrad
Maximum angle deviation beta-y: 0.2mrad
Maximum angle deviation beta-z: 1.1mrad
Maximum repeatability: +/-0.05um
Maximum transverse displacement: 3um
Weight: approx.1175g
Operating temperature: 0-60deg

Application:
For electrically controlled fine height adjustment requiring exact positioning in the sub-micrometre range.

Dimensions:
Top/reference area: 85 x 85mm
Mounting hole Dia.5.4mm
Drawing reference dimensions: 42.5mm, 25mm and 5mm

Optional:
Optional measuring system for higher accuracy
Through-hole version up to Dia.38mm for transmitted-light applications