Technical Data:
Series: 178
Detector measuring force: 0.75 mN
Stand type: Motorized stand
X-axis range: 100 mm
Z1 detector ranges: 800 um, 80 um, 8 um
X-axis resolution: 0.05 um
Z1 resolution: 0.01 um (800 um); 0.001 um (80 um); 0.0001 um (8 um)
Z2 column resolution: 1 um
Assessed profiles: Primary, Roughness, Waviness, DF, Roughness motif, Waviness motif

Application:
Dedicated-control-unit surface roughness measurement.