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MITUTOYO 378-184-3 FS-70 Microscope Unit For Semiconductor Inspection
Order No.
378-184-3
Product Details
Technical Data:
Series: 378
Model: FS70-TH
Base: Standard
Focus: 50 mm travel; fine 0.1 mm/rev; coarse 3.8 mm/rev
Image: Erect
Pupil distance: 51 to 76 mm / 2 to 3 in
Field number: 24
Tilt angle: 0 to 20 deg
Optical pass ratio: 100/0 or 0/100
Protective filter: None
Tube lens: 1X
Applicable laser: None
Illumination: Optional reflective bright-field Koehler; 12 V 100 W fiber optics; 1.5 m light guide; 150 W
Observation objectives: M Plan Apo, M Plan Apo SL, G Plan Apo
Loading weight: 13.6 kg / 30 lb
Mass: 7.1 kg / 15.5 lb
Application:
Semiconductor-inspection / prober-station microscope unit.
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