top of page

MITUTOYO 378-187-3 FS-70 Microscope Unit For Semiconductor Inspection

Order No.

378-187-3

Product Details

Technical Data:
Series: 378
Model: FS70L4-TH
Base: Standard
Focus: 50 mm travel; fine 0.1 mm/rev; coarse 3.8 mm/rev
Image: Erect
Pupil distance: 51 to 76 mm / 2 to 3 in
Field number: 24
Tilt angle: 0 to 20 deg
Optical pass ratio: 100/0 or 0/100
Protective filter: Laser filter
Tube lens: 1X
Applicable laser: 532 / 266 nm
Illumination: Optional reflective bright-field Koehler; 12 V 100 W fiber optics; 1.5 m light guide; 150 W
Observation objectives: M Plan Apo, M Plan Apo SL, G Plan Apo
Loading weight: 13.1 kg / 29 lb
Mass: 7.5 kg / 16.5 lb

Application:
Semiconductor-inspection / prober-station microscope unit.

©2026 by MY INDUSTRIAL SOLUTION ENTERPRISE.

bottom of page