Technical Data:
Series: 516
Product type: Step Master
Application: Z-axis calibration of optical instruments
Adjacent-step measurement: Measured to 0.01 um by interferometer
Adjacent-step allowance: +/-0.20 um
Material: Ceramic
Adjacent step values No.1-2 / 2-3 / 3-4 / 4-5: 10 / 5 / 2 / 1 um

Dimensions:
Overall length=300 mm
Block layout=5 stepped blocks, No.1 to No.5
Block reference dimensions shown=45 mm; 15 mm; 25 mm; R7 mm
Individual block width reference=7 mm
Step stack maximum-height geometry as shown in catalogue.