Technical Data:
Series: 525
X1 range: 200 mm; resolution 0.05 um; reflective linear encoder
CNC speed: Max. 200 mm/s; joystick 0 to 50 mm/s; measuring 0.02 to 2.0 mm/s
Contour: pulling/pushing; straightness 2 um / 200 mm; X accuracy +/-(0.8+4L/200) um
Surface roughness: pulling; straightness 0.5 um / 200 mm
Contour Z1: 60 mm (+/-30 mm); resolution 0.02 um; accuracy +/-(0.8+|2H|/100) um
Roughness Z1: 800 / 80 / 8 um; resolution 0.01 / 0.001 / 0.0001 um
Y-axis table: Installed; 200 mm; 0.05 um; max load 20 kg
Z2 vertical travel: 500 mm; resolution 0.05 um
Alpha-axis: Installed
Base: Granite

Application:
CNC surface roughness and contour measurement.

Dimensions:
Base size: 750 x 600 mm